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Publication numberWO2004109750 A3
Publication typeApplication
Application numberPCT/KR2004/001381
Publication date26 Jan 2006
Filing date10 Jun 2004
Priority date10 Jun 2003
Also published asWO2004109750A2
Publication numberPCT/2004/1381, PCT/KR/2004/001381, PCT/KR/2004/01381, PCT/KR/4/001381, PCT/KR/4/01381, PCT/KR2004/001381, PCT/KR2004/01381, PCT/KR2004001381, PCT/KR200401381, PCT/KR4/001381, PCT/KR4/01381, PCT/KR4001381, PCT/KR401381, WO 2004/109750 A3, WO 2004109750 A3, WO 2004109750A3, WO-A3-2004109750, WO2004/109750A3, WO2004109750 A3, WO2004109750A3
InventorsBeom-Seok Cho, Hee-Jung Yang, Chang-Oh Jeong, Jae-Gab Lee, Myung-Mo Sung
ApplicantSamsung Electronics Co Ltd, Beom-Seok Cho, Hee-Jung Yang, Chang-Oh Jeong, Jae-Gab Lee, Myung-Mo Sung
Export CitationBiBTeX, EndNote, RefMan
External Links: Patentscope, Espacenet
Wiring for semiconductor device, thin film transistor array panel including wiring, and manufacturing method thereof
WO 2004109750 A3
Abstract
A method of manufacturing a thin film panel is provided, which includes: forming a gate line (20) on a substrate (10), the gate line including a gate electrode; forming a gate insulating layer on the gate line; forming a silicon layer formed on the gate insulating layer; forming a data line intersecting the gate line and a drain electrode separated from the data line on the silicon layer or on the gate insulating layer; and forming a self assembled monolayer (SAM) (30) on at least one of the gate line and the data line.
Patent Citations
Cited PatentFiling datePublication dateApplicantTitle
US6395454 *4 Feb 200028 May 2002Infineon Technologies AgIntegrated electrical circuit with passivation layer
US6433359 *6 Sep 200113 Aug 20023M Innovative Properties CompanySurface modifying layers for organic thin film transistors
US20020084252 *28 Dec 20004 Jul 2002Buchwalter Stephen L.Self-assembled monolayer etch barrier for indium-tin-oxide useful in manufacturing thin film transistor-liquid crystal displays
Classifications
International ClassificationH01L, H01L21/768
Cooperative ClassificationB82Y30/00, B82Y10/00
European ClassificationB82Y30/00, B82Y10/00
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